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    UHV 可烘烤傳感器

    UHV 可烘烤傳感器

    • 所屬分類:薄膜沉積和電子槍控制裝置

    • 點擊次數:
    • 發布日期:2018/01/04
    • 在線詢價
    詳細介紹

    UHV 可烘烤傳感器

    INFICON UHV 可烘烤晶體傳感器擁有經實踐檢驗的可靠性和耐用性,提供超越當前市場上的任何傳感器頭的Z佳熱穩定性??珊婵緜鞲衅饔?304 號不銹鋼、鉬、鉻鎳鐵合金、鎳和氧化鋁材料制成,設計為可承受連續烘烤溫度高達 450° C(僅適用于烘烤,實際沉積監控需要水流)。前裝式設計允許在側面插入空間不足的應用中輕松插入晶體支架。

    UHV Bakeable Sensor_detail_sil_left_SMALL.png

    功能

    • 高溫銅焊和焊接結構

    • 烘烤溫度高達 450° C

    • 晶體閘(選件)

    • 前裝式晶體支架

    • 易于安裝

    • CF40 饋入件

    • 饋入件不需要銅焊或焊接

    • 焊接為客戶指定長度的傳感器/饋入件組合

    規格

    類型Bakeable Sensor w/ ShutterBakeable Sensor w/out Shutter
    Z高溫度
    400° C continuous (for bake only; water flow recommended for actual deposition monitoring)450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
    傳感器頭部尺寸(Z大外殼)
    1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
    晶體交換
    Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
    安裝

    a) Standard—four #4-40 tapped holes on the back of the body

    b) Optional—right angle bracket; IPN 007-108

    Four #4-40 tapped holes on the back of the body
    饋入件

    2? in. ConFlat?, integral with sensor head

    Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)

    2? in. ConFlat, integral with sensor head

    Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)

    實用工具

    1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.)

    2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa]

    3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required

    Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.)
    材料

    主體和支架
    304 type stainless steel304 type stainless steel
    彈簧
    Molybdenum and Inconel X-750Molybdenum and Inconel X-750
    水、空氣和同軸管線
    0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
    其他機械部件
    18-8 or 304 stainless18-8 or 304 stainless
    絕緣體
    >99% Al2O3 in vacuum; other high density ceramics used elsewhere>99% Al2O3 in vacuum; other high density ceramics used elsewhere
    電線

    1) Ni (in vacuum)

    2) Ni plated Cu (elsewhere)

    1) Ni (in vacuum)

    2) Ni plated Cu (elsewhere)

    銅焊
    Vacuum process high temperature Ni-Cr alloyVacuum process high temperature Ni-Cr alloy
    晶體
    0.550 in. (13.97 mm) diameter0.550 in. (13.97 mm) diameter

    零件號

    UHV PN.png

    附件

    零件號明細
    750-420-G1電磁閥,24 伏(與帶閘門和多晶體傳感器配合使用)

    耗材

    名稱說明
    石英監控器晶體石英監控器晶體

    備件

    零件號明細
    007-007止動彈簧(用于晶體支架)
    007-064陶瓷夾持器
    007-094Clamping Sring, UHV Bakeable Sensor
    007-095Handle, UHV Bakeable Sensor
    007-098母型連接器(包括套圈和螺母)
    007-099可烘烤頭部觸點
    007-100High Temperature BNC Insulator
    007-103Insulator, UHV Bakeable Sensor
    007-104High Temperature BNC Body, Bakeable
    007-147Vented Screw, 4-40 x 3/8 in.
    007-155BRAZE ASM 12 IN. 206-804-G1
    007-156BRAZE ASM 20 IN 206-804-G2
    007-157BRAZE ASM 30 IN 206-804-G3
    007-228SPEC,4-40 X 5/8 VENTED SHC SC
    007-267-P2Spreader Bar, UHV Bakeable Sensor
    007-268-P1Shoulder Washer, UHV Bakeable Sensor
    007-269-P1Shoulder Washer, UHV Bakeable Sensor
    008-007CRYSTAL SNATCHER
    059-0084Gasket, Copper, Bakeable Sensor Actuator
    070-201#4 開口緊鎖墊圈
    084-069-P1SCREW 4-40 x .187 LG PHIL FLAT HD SS
    750-018-P3SPLIT CLAMP {THD} {CLEAN} @
    750-018-P5SPLIT CLAMP {CLEAN} @
    750-022-G5ACTR/AIR LINE 12 IN {CLEAN}
    750-022-G6ACTR/AIR LINE 20 IN {CLEAN}
    750-022-G7Actuator/Air Line 76.2 cm (30 in.),Clean
    750-028-G5BK XTAL SNS/FT/AIR 12 IN CLEAN
    750-028-G6BK XTAL SNS/FT/AIR 20 IN CLEAN
    750-028-G7BK XTAL SNS/FT/AIR 30 IN CLEAN
    750-115-P4聯軸器(安裝到波紋管組件)
    750-118-P4ACT SUPPORT W/ DOWEL
    750-120-G3ASSY,SHAFT
    750-216-G1閘門組件(閘門模塊的組成部分)
    750-218-G1Crystal Holder, Bakeable Sensor


    相關標簽:?薄膜沉積和電子槍控制裝置,UHV可烘烤傳感器價格,UHV可烘烤傳感器批發

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