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    Crystal 12 傳感器

    Crystal 12 傳感器

    • 所屬分類:薄膜沉積和電子槍控制裝置

    • 點擊次數:
    • 發布日期:2018/01/04
    • 在線詢價
    詳細介紹

    Crystal 12 傳感器

    自動晶體轉換功能Z大限度延長生產時間
    Crystal12_web.png

    INFICON Crystal 12 傳感器與INFICON IC6 薄膜沉積控制器結合使用時,可自動更換其晶體,而無需中斷過程。晶體不穩定或失效時,IC6 會立即向 Crystal 12傳感器旋轉傳送帶發送信號,要求其立即將新晶體旋轉到位,從而實現持續沉積速率監控。為進一步Z小化停工時間,可以將晶體預先加載到另一個可選旋轉傳送帶上,這樣,可以直接輕松快速地更換裝有失效晶體的旋轉傳送帶,從而Z大限度縮短系統打開的時間。

    功能

    • 裝有 12 顆晶體,可進行可靠的自動轉換,從而Z大限度延長過程運行時間

    • 易于拆卸的旋轉傳送帶允許快速更換所有 12 顆晶體

    • 晶體轉換由空氣驅動完成(競爭產品是使用生熱電機),因而晶體溫度非常穩定

    • 易于拆卸的前沉積罩保護晶體和旋轉傳送帶上不會積存材料,從而Z大限度減少拆卸整個傳感器以進行維護的必要性

    • 可選安裝后套件允許用戶根據公制硬件大小自行修改

    規格

    類型Crystal 12 Sensor
    無水時的Z高烘烤溫度
    130°C
    Z小水流時的Z高工作等溫環境溫度
    300° C
    尺寸(Z大外殼)
    4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
    水管和空氣管長度
    Standard 30 in. (762 mm)
    晶體交換
    Front-loading
    安裝
    Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
    重量
    4.92 lb. (2.23 kg)
    安裝要求
    饋入件

    Qty (1) 2-3/4 in. ConFlat? with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1,

    or,

    Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings

    or,

    Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1

    安裝
    User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
    空氣和水連接
    User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
    實用工具
    Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.
    材料
    板、材料罩、機械部件、主體和圓盤
    304 type stainless steel
    彈簧、電氣觸點
    Au plated Be-Cu, Au Plated 302 stainless steel
    水管和空氣管
    S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
    連接器
    Stainless steel
    絕緣體
    Teflon, Peek?
    電纜
    Teflon insulated copper plated steel
    晶體
    0.550 in. (13.97 mm) diameter
    1 in. 螺栓和 Ultra-Torr(壓縮接頭)端接:
    材料
    304 stainless steel, Teflon, ceramic, beryllium nickel, VITON?
    溫度
    Operational environment to 300° C with water cooling or 165° C without
    安裝
    1.015 in. ±0.010 in. diameter aperture
    CF 40 焊接式端接:
    材料
    304 stainless steel, Teflon, ceramic, beryllium nickel
    溫度
    Operational environment to 450° C with water cooling or 165° C without
    安裝
    Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min.

    零件號

    Crystal12_OrderChart_2013_web-01.png

    附件

    名稱說明
    QCM 傳感器饋入件QCM 傳感器饋入件
    Crystal 12 Sensor
    零件號明細
    750-420-G1電磁閥,24 伏(與帶閘門和多晶體傳感器配合使用)

    耗材

    名稱說明
    石英監控器晶體石英監控器晶體

    備件

    Crystal 12 Sensor
    零件號明細
    750-276-P3XTAL12 ACTUATOR COVER PASSIVATED
    750-644-G1CAROUSEL HOUSING WELDMENT
    750-658-G1Deposition Shield Assembly, Crystal 12
    750-286-P2Pneumatic Actuator,CrystalSix/Crystal 12
    750-291-P1Detent, CrystalSix/Crystal 12
    750-294-P2Stop Ratchet, CrystalSix/Crystal 12
    750-293-P2Ratchet, CrystalSix/Crystal 12
    750-256-P2Extension Spring
    750-252-P2DET,SPRING POST
    750-649-G1Electrical Connection, Crystal 12
    750-295-G1Pawl/Actuator Stem, Crystal 12 Sensor
    750-258-P2DET - Bearing Shaft
    070-0779Ball Bearing, CrystalSix
    750-652-G1Crystal Carousel, Crystal 12 Sensor
    750-650-P1RESISTOR NETWORK APERTURE PLATE
    070-1253Dowel Pin, CrystalSix
    750-651-P1RESISTOR NETWORK SUPPORT
    750-655-P1RESISTOR NETWORK INSULATOR
    750-642-G1Resistor Network Grid Weldment
    750-661-P1Contact Terminal, Crystal 12
    750-656-P1CRYSTAL INSULATOR
    321-038-P6Leaf Spring, Crystal 12
    750-657-P1Leaf Spring, Grounding, Crystal 12
    750-671-P1Torsion Spring, Gold Plated, Crystal 12
    750-626-P1Spring, Crystal 12 and Sputtering Sensor
    750-647-P1Carousel Spindle Body, Crystal 12
    070-1268Bearing, CrystalSix
    070-1254E-RING BOWED #H51310075STBtruarc
    750-660-P1Location Screw, 6-32, Crystal 12
    007-126DET-30"STN STL SEAMLESS TUBING
    070-201#4 開口緊鎖墊圈
    084-004#4-40 X 0.187 內六角頭螺釘
    070-3985103-12H,EXT CRESCENT RET RING
    070-0867B4-10,1/8"SHAFT SPACER .094TH
    070-170#2 SPLIT LOCKWASHER SS
    070-177#4-40 X 3.12 六角頭螺釘
    080-038SCREW 0-80 x .375 LG PHIL PAN HD SS
    082-032Lock Washer, #2, Stainless Steel
    082-045#2-56 x 0.187 十字槽螺釘
    084-054開牙鎖定墊片4號
    082-022Washer, #2, Flat, Stainless Steel
    082-024Screw, Socket Head, 2-56 x 0.250 in.
    750-292-P2Detent Spacer, CrystalSix/Crystal 12
    080-013開口墊片#0
    080-007-P1Flat Washer, Stainless Steel
    080-009-P1#0-80 X 0.188 凹頭螺釘
    084-048SCREW 4-40 x .250 LG PHIL FLAT HD SS
    750-665-P1Shoulder Screw, 2-56, Torsion Spring
    084-093Screw, Socket Head, 4-40 x 1.125 in.
    086-084-P2#6-21 x 1/8 固定螺釘
    086-041#6 平墊圈
    086-038#6 開口緊鎖墊圈
    086-036#6-32 x 3/8 凹頭螺釘
    In-vacuum cables
    321-039-G12真空電纜,15.2 厘米(6 英寸)
    007-252真空電纜,30.5 厘米(12 英寸)
    321-039-G11真空電纜,61.0 厘米(24 英寸)
    007-044真空電纜,78.1 厘米(30.75 英寸)
    007-059真空電纜,91.4 厘米(36 英寸)
    007-061真空電纜,121.9 厘米(48 英寸)- 需要 ModeLock 控制器
    321-039-G13真空電纜,154.2 厘米(60 英寸)- 需要 ModeLock 控制器
    321-039-G14真空電纜,182.9 厘米(72 英寸)- 需要 ModeLock 控制器
    321-039-G15真空電纜,3.5 米(137.8 英寸)- 需要 ModeLock 控制器和4 米 XIU
    321-039-G16真空電纜,4 米(157.5 英寸)- 需要 ModeLock 控制器和4 米 XIU


    相關標簽:?薄膜沉積和電子槍控制裝置,Crystal12傳感器價格,Crystal12傳感器批發

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